Valves are the core components in semiconductor vacuum systems and fluid systems, which play the role of opening and closing, controlling flow/direction, regulating pressure, etc. There are many kinds of valves, such as valves in vacuum systems can be divided into isolation valves, control valves, transmission valves, etc. In the fluid system, diaphragm valves and pressure regulating valves are needed. Semiconductor valve requirements are very strict, the tightness, vacuum, cleanliness and other parameters have very high requirements, in the selection of materials, surface treatment and other aspects have brought greater difficulty to manufacturers.

Gate valve

structure features: the gate valve's gate plate moves in the vertical direction along the center line of the channel, making the valve less obstructed to the flow of the medium when it is fully open or fully closed, similar to the principle of the gate. The closing parts are usually flat or wedge-shaped RAMS, which are closely fitted with the sealing surface of the seat to achieve sealing.

Working principle: Through the hand wheel, electric or pneumatic device to drive the ram lift, so as to control the opening and closing of the valve, in order to achieve the purpose of connecting or cutting off the air flow in the vacuum pipe.

Application scenario: It is suitable for the occasions where the vacuum degree is high, the medium is clean and the flow control requirements are not very accurate. It is often used in the main channel of high vacuum system in semiconductor manufacturing.

Angle valve

structure features: The valve body of the Angle valve is right-angled, usually the inlet and outlet channels are not in the same straight line, generally 90 degrees Angle. Its structure is compact, the spool is mostly spherical or conical, and the valve opening and closing control is realized by rotating the spool.

Working principle: When the spool is rotated to the open position, the medium can flow from the inlet to the outlet; When rotated to the closed position, the spool is tightly attached to the seat, blocking the flow of the medium.

Application scenario: It is often used in the branch of the vacuum tube that needs to be opened and closed frequently in semiconductor equipment and requires relatively compact space, such as the vacuum pipe connection part of some small reaction chambers.

Diaphragm valve

structure features: The valve body inside the diaphragm valve has a layer of elastic diaphragm, the valve body cavity is separated from the medium. The diaphragm, usually made of rubber or other corrosion-resistant, wear-resistant material, opens and closes the valve by moving the diaphragm up and down.

Working principle: Push the diaphragm with manual, pneumatic or electric device to fit or separate it from the seat, so as to achieve on-off control of the vacuum pipe. In the closed state, the diaphragm can effectively prevent media leakage and avoid direct contact between the media and the metal parts inside the valve, reducing corrosion and wear.

Application scenario: In the semiconductor manufacturing process, it is often used for the control of vacuum tubes that require very high media purity, corrosive or easily crystallized media, such as gas conveying pipelines in chemical vapor deposition (CVD) equipment.

Butterfly valve

structure characteristics: the butterfly valve body is disc-shaped, there is a rotating butterfly plate inside, the butterfly plate rotates around the valve shaft, the rotation Angle is usually between 0° and 90°, which can achieve accurate adjustment of the medium flow rate.

Working principle: By rotating the plate, change the Angle between the plate and the valve body channel, so as to control the flow area and flow size of the medium. When the disc is rotated perpendicular to the valve body channel, the valve is closed; When the disc is rotated parallel to the valve body channel, the valve is fully open.

Application scenario: Suitable for large diameter vacuum pipe and high flow regulation requirements, such as the vacuum exhaust system in semiconductor factory, because of its simple structure, small volume, light weight, easy to operate and other advantages.

Ball valve

structure features: ball valve spool is a ball, the ball has a round through the hole, the ball through the valve stem and the drive device connected, can be rotated around the axis of the valve stem. The position of the ball in the valve body determines the opening and closing state of the valve, and the ball can be fully opened or closed by rotating 90°.

Working principle: When the ball hole is aligned with the valve body inlet and outlet channel, the valve is in a fully open state, and the medium can pass smoothly; When the ball rotates so that the through hole is perpendicular to the inlet and outlet passage, the valve is closed and the medium flow is cut off.

Application scenario: It is often used in vacuum systems where the medium flow needs to be quickly cut off or connected, and in vacuum tubes where the medium flow control accuracy is not required, but the sealing performance is required to be good, such as some auxiliary vacuum systems in semiconductor manufacturing.

plug valve

Structural features : The plug valve is composed of a valve plate, a seat, a guide rail, a driving device and other components. The valve plate is usually flat shaped and can move perpendicular to the direction of the medium flow on the guide rail, and the valve is opened and closed by inserting or withdrawing the valve plate.

Working principle: When opened, the valve plate is lifted or pulled out of the valve body channel, so that the medium can pass freely; When closed, the valve plate is lowered into the seat and closely fits with the sealing surface of the seat to prevent the medium from passing through.

Application scenario: It is mainly used in situations where the vacuum degree is high, the medium is clean gas and the sealing performance of the valve is very high, such as the high purity gas conveying system in semiconductor manufacturing and the vacuum chamber isolation of vacuum coating equipment.

Solenoid valve

structure features: Solenoid valve is composed of solenoid coil, iron core, valve core, valve body and other parts. When the electromagnetic coil is energized, a magnetic field is generated to attract the movement of the iron core, which drives the action of the valve core and realizes the opening and closing control of the valve.

Working principle: When the electromagnetic coil is energized, the iron core is sucked up under the action of the magnetic field, driving the valve core to move upward and the valve is opened; When the electromagnetic coil is powered off, the iron core is reset under the action of spring force or self-weight, and the spool falls to close the valve.

Application scenario: It is suitable for semiconductor vacuum systems requiring remote control, high degree of automation and certain requirements for switching speed, such as in the vacuum control system of some semiconductor production equipment, it can cooperate with the computer control system to achieve accurate vacuum adjustment and gas flow control.